Diamond Waveguides Fabricated by Reactive Ion Etching
Tuesday, December 23rd, 2008We demonstrate for the first time the feasibility of all-diamond integrated optic devices over large areas using a combination of photolithography, reactive ion etching and focused ion beam techniques. We confirm the viability of this scalable process by demonstrating guidance in a two-moded ridge waveguide in type 1b single crystal diamond. This opens the door [...]